"Feedback control of thin film growth in an HPCVD reactor via reduced order ..."

H. T. Banks et al. (2001)

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DOI: 10.1109/.2001.981123

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type: Conference or Workshop Paper

metadata version: 2022-10-06

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H. T. Banks, S. C. Beeler, Grace M. Kepler, Hien T. Tran:
Feedback control of thin film growth in an HPCVD reactor via reduced order models. CDC 2001: 1577-1582

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