BibTeX record conf/irps/AchantaMBKG22

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@inproceedings{DBLP:conf/irps/AchantaMBKG22,
  author       = {Ravi Achanta and
                  V. McGahay and
                  S. Boffoli and
                  C. Kothandaraman and
                  J. Gambino},
  title        = {High-k {MIM} dielectric reliability study in 65nm node},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2022, Dallas,
                  TX, USA, March 27-31, 2022},
  pages        = {32--1},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/IRPS48227.2022.9764589},
  doi          = {10.1109/IRPS48227.2022.9764589},
  timestamp    = {Mon, 09 May 2022 18:11:25 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/AchantaMBKG22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}