"TDDB Reliability Improvement of Low Thermal Budget RMG Stacks."

G. Molinaro et al. (2025)

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DOI: 10.1109/IRPS48204.2025.10982857

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-15

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G. Molinaro, Hiroaki Arimura, S. Sacchi, Andrea Vici, Robin Degraeve, Ben Kaczer, Naoto Horiguchi, M. Houssa, Jacopo Franco:
TDDB Reliability Improvement of Low Thermal Budget RMG Stacks. IRPS 2025: 1-6

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