"Record-Low EOT(3.6Å) & ..."

Hunbeom Shin et al. (2025)

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DOI: 10.1109/IRPS48204.2025.10983902

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type: Conference or Workshop Paper

metadata version: 2025-06-04

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Hunbeom Shin, Giuk Kim, Sujeong Lee, Geonhyeong Kang, Hyojun Choi, Taeseung Jung, Sanghun Jeon, Hyung-Jun Kim, Jinho Ahn:
Record-Low EOT(3.6Å) & Jleak(7×10^-8A/cm²@0.8V) HZO by Dielectric-Selective Microwave Annealing. IRPS 2025: 1-9

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