"Impact of lithography retargeting process on low level interconnect in ..."

Hongbo Zhang et al. (2012)

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DOI: 10.1145/2347655.2347659

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type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hongbo Zhang, Yunfei Deng, Jongwook Kye, Martin D. F. Wong:
Impact of lithography retargeting process on low level interconnect in 20nm technology. SLIP 2012: 3-10

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