Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass.

Akito Hara Shinya Kamo Tadashi Sato Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass. 1048-1054 2014 97-C IEICE Trans. Electron. 11 https://doi.org/10.1587/transele.E97.C.1048 http://search.ieice.org/bin/summary.php?id=e97-c_11_1048 db/journals/ieicet/ieicet97c.html#HaraKS14