"A novel harmless trimming for micro-device with defects and particles in ..."

Yongqi Fu, Zhongwei Shen, Ngoi Kok Ann Bryan (2004)

> Home

Details and statistics

DOI: 10.1016/J.MEJO.2003.10.006

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mj/FuSB04
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mj/FuSB04
Yongqi Fu, Zhongwei Shen, Ngoi Kok Ann Bryan:
A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam. Microelectron. J. 35(2): 111-115 (2004)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.