A survey on semiconductor wafer yield prediction by artificial intelligence.

Dongyan Zhao 0002 Yining Chen 0001 Pang Guo Fangke Chen Ruyue Jing Xin Xu Yanning Chen Fang Liu Bo Wu A survey on semiconductor wafer yield prediction by artificial intelligence. 106958 2026 167 Microelectron. J. https://doi.org/10.1016/j.mejo.2025.106958 db/journals/mj/mj167.html#ZhaoCGCJXCLW26 streams/journals/mj