"Robustify ML-Based Lithography Hotspot Detectors."

Jingyu Pan et al. (2022)

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DOI: 10.1145/3508352.3549389

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-20

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Jingyu Pan, Chen-Chia Chang, Zhiyao Xie, Jiang Hu, Yiran Chen:
Robustify ML-Based Lithography Hotspot Detectors. ICCAD 2022: 134:1-134:7

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