An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs.

Makoto Mita Hiroshi Toshiyoshi An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs. 256-263 2009 6 IEICE Electron. Express 5 https://doi.org/10.1587/elex.6.256 https://www.wikidata.org/entity/Q114961981 db/journals/ieiceee/ieiceee6.html#MitaT09